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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Thermal Stability of Al-doped ZrO
2
Films Prepared by Reactive RF Magnetron Sputtering
MA Chun-Yu,LI Zhi,ZHANG Qing-Yu
Journal of Inorganic Materials . 2007, (
6
): 1206 -1210 . DOI: 10.3724/SP.J.1077.2007.01206
