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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Function Relation Formulae Between Experimental Parameters and Preferential Orientation Intensity of AlN Films
XU Xiao-Hong,ZHANG Fu-Qiang,WU Hai-Shun,ZHANG Cong-Jie,LI Zuo-Yi
Journal of Inorganic Materials . 2001, (
6
): 1161 -1168 .
