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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Al
2
O
3
Films Deposited by Plasma Source Enhanced Magnetron Sputtering
LEI Ming-Kai,YUAN Li-Jiang,ZHANG Zhong-Lin
Journal of Inorganic Materials . 2002, (
4
): 887 -890 .
