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ISSN:1000-324X CN:31-1363/TQ
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Journal of Inorganic Materials
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中文
Effects of Deposition Conditions on Deposition Thermodynamics and Morphology of CVD-SiC
XIAO Peng,XU Yong-Dong,HUANG Bai-Yun
Journal of Inorganic Materials . 2002, (
4
): 877 -881 .
