Research Paper

Temperature-dependent Microstructural Properties of Amorphous Diamond Films

  • ZHU Jia-Qi ,
  • MENG Song-He ,
  • CHEN Wang-Shou ,
  • HAN Jie-Cai
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  • Center for Composite Materials, Harbin Institute of Technology, Harbin 150080, China

Received date: 2006-06-25

  Revised date: 2006-07-19

  Online published: 2007-05-20

Abstract

The temperature sensibility of amorphous diamond (a-D) films deposited with the filtered cathodic vacuum arc technology was investigated in the range of -190-600℃. The samples cooled by liquid nitrogen pump were $in~situ$ measured on a Linkam stage and the samples for thermal stability were heated in a furnace. The microstructure and mechanical properties were respectively examined by visible Raman spectroscopy and a nanoindenter. The results show that a-D films have better thermal stability in air, they can hold their hardness up to 400℃ and hold their structure up to 500℃. However, the complete material loss takes place at about 600℃. Raman measurements show an apparent shift of the G-peak frequency to higher values with increasing annealing temperatures. The films are not sensitive to lower temperatures. The microstucture of the films remains stable as temperatures are decreased to -190℃.

Cite this article

ZHU Jia-Qi , MENG Song-He , CHEN Wang-Shou , HAN Jie-Cai . Temperature-dependent Microstructural Properties of Amorphous Diamond Films[J]. Journal of Inorganic Materials, 2007 , 22(3) : 565 -569 . DOI: 10.3724/SP.J.1077.2007.00565

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