Research Paper

Controlled Preparation of Porous Silicon as Diffusion Layer for Miniature Fuel Cell

  • ZHENG Dan ,
  • TIAN Juan ,
  • ZHANG Xi-Gui ,
  • XIA Bao-Jia ,
  • ZHANG Bao-Hong
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  • 1. Shanghai Institute of Micro-system and Information Technology,
    Chinese Academy of Sciences, Shanghai 200050, China; 2. Shanghai Institute of
    Technology, Shanghai 200233, China; 3. Harbin Engineering University, Harbin 150001, China

Received date: 2005-12-13

  Revised date: 2006-05-15

  Online published: 2006-11-20

Abstract

Porous silicon (PS) due to its porous structure and large surface-to-volume ratio is prospective to substitute the traditional diffusion layer materials such as carbon paper or carbon cloth in miniaturized fuel cell based on MEMS technology. On singal-crystalline silicon n<100>(0.04--0.15Ω·cm) PS film was prepared. In order to make the preparation controllable, the effects of various experimental conditions including HF concentration, current density and anodization duration on porosity, pore depth and anodization rate were systematically examined. The C-V curves of PS film with 40% porosity, 500--700nm aperture and 60μm depth in 0.5mol/L H2SO4 solution indicate that PS electrode surfaces exhibit comparable catalytic activity with that of carbon paper. Therefore, the PS film shows potential application value in μPEMFCs .

Cite this article

ZHENG Dan , TIAN Juan , ZHANG Xi-Gui , XIA Bao-Jia , ZHANG Bao-Hong . Controlled Preparation of Porous Silicon as Diffusion Layer for Miniature Fuel Cell[J]. Journal of Inorganic Materials, 2006 , 21(6) : 1367 -1372 . DOI: 10.3724/SP.J.1077.2006.01367

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