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Journal of Inorganic Materials

Journal of Inorganic Materials >

2006 , Vol. 21 >Issue 4: 993 - 998

DOI: https://doi.org/10.3724/SP.J.1077.2006.00993

Research Paper

Effects of Post-annealing Treatment on the Structural and Optical Properties of Cubic MgxZn1-xO Thin Films Grown on Sapphire

  • CHEN Nai-Bo ,
  • WU Hui-Zhen ,
  • XU Tian-Ning ,
  • YU Ping
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  • 1. Department of Science, Zhijiang College of Zhejiang University of Technology, Hangzhou 310024, China;
    2. Department of Physics, Zhejiang University, Hangzhou 310027, China;
    3. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute
    of Microsystem and Information Technology, CAS, Shanghai 200050, China

Received date: 2005-08-09

  Revised date: 2005-10-17

  Online published: 2006-07-20

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Abstract

Single cubic-phase MgxZn1-xO(x>0.5) alloy films were synthesized on c-plane
sapphire substrates by low temperature physical deposition. The effects of the post-annealing treatment on the structural properties of the films were investigated by the measurements of XRD and transmission spectra. Hexagonal-phase (wurtzite) MgZnO was observed segregating from the cubic-phase Mg0.53Zn0.47O film after annealing at 900℃, while no secondary phase was seen in the samples with Mg fraction exceeding 0.55. Electrical measurement indicates that cubic-phase Mg0.55Zn0.45O films can be used in metal-insulator-silicon (MIS) structures as insulators with low leakage current densities. It could be concluded that the cubic-phase MgxZn1-xO films with x exceeding 0.55 are stable enough to be applied in fabricating high quality optoelectronic devices.

Key words： cubic MgxZn1-xO films; anneal; crystal structure; optical property; electrical property

Cite this article

CHEN Nai-Bo , WU Hui-Zhen , XU Tian-Ning , YU Ping . Effects of Post-annealing Treatment on the Structural and Optical Properties of Cubic MgxZn1-xO Thin Films Grown on Sapphire
[J]. Journal of Inorganic Materials, 2006 , 21(4) : 993 -998 . DOI: 10.3724/SP.J.1077.2006.00993

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