Journal of Inorganic Materials >
Lithium Tantalate Wafer: Advances in Thinning Technology and Application in Pyroelectric Infrared Detectors
Received date: 2025-09-28
Revised date: 2025-11-20
Online published: 2025-12-11
Supported by
Key R&D Program of Zhejiang(2024SSYS0042);Key R&D Program of Zhejiang(2024SSYS0043);Zhejiang Provincial Natural Science Foundation(LQN26F040003);Zhejiang Province Introduces and Cultivates Leading Innovation and Entrepreneurship Teams(2023R01011)
Lithium tantalate (LiTaO3, LT) stands as a significant multifunctional ferroelectric material, playing a critical role in infrared detectors and thermal imaging sensors, owing to its outstanding pyroelectric coefficient, stable physicochemical properties, and broad-band spectral response. In recent years, rapid advancements in micro-electromechanical systems (MEMS) and integrated photonics have driven the evolution of sensor and detection systems toward miniaturization, integration, and high performance. Consequently, the core sensing material of pyroelectric devices has progressively shifted from traditional bulk crystals to high-quality LT single-crystal films, aiming to achieve superior thermal management and electrical performance. This article systematically reviews the development of key thinning technologies for LT single crystals, covering a range of processes from conventional mechanical grinding and chemical mechanical polishing (CMP) to emerging advanced techniques such as crystal ion slicing and the Smart-Cut process. It includes a focused analysis of principles underlying each technical route, achievable film thickness, crystal quality, and their respective advantages and limitations. Building on this foundation, the paper further discusses the application advantages and performance of thinned LT films in pyroelectric detectors. Finally, the review outlines the current technical challenges associated with the fabrication and integration of ultra-thin LT single crystals and offers perspectives on future development directions. This review provides a valuable reference for the development of next-generation, high-performance, and miniaturized pyroelectric devices.
HU Yuqing , ZHU Yixin , LE Xianhao , WAN Qing . Lithium Tantalate Wafer: Advances in Thinning Technology and Application in Pyroelectric Infrared Detectors[J]. Journal of Inorganic Materials, 2026 , 41(6) : 764 -774 . DOI: 10.15541/jim20250381
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