Research Paper

Superhard C1-x-yNxZry Composite Films Prepared by Pulsed Bias Arc Ion Plating

  • LI Gong-Kai ,
  • LIN Guo-Jiang ,
  • DONG Chen
Expand
  • Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Ministry of Education, Dalian University of Technology,Dalian 116024, China

Received date: 2009-09-04

  Revised date: 2009-10-22

  Online published: 2010-05-12

Abstract

A series of C1-x-yNxZry composite films were deposited on a cemented carbide substrate using pulsed bias arc ion plating by adjusting the nitrogen flow rate and the Zr target arc current simultaneously with  the graphite target arc current fixing. The Zr and N contents in the films increase linearly while the C content shows an inverse trend as the Zr target arc current and N flow rate increase. The Raman spectra indicate that the deposited films are the characteristic diamondlike carbon. XRD results show that the ZrN crystalline phase is formed in the films. The hardness first increases and then decreases with increasing Zr and N contents, reaching the highest superhard value of 43.6GPa at x=0.19, y=0.28.

Cite this article

LI Gong-Kai , LIN Guo-Jiang , DONG Chen . Superhard C1-x-yNxZry Composite Films Prepared by Pulsed Bias Arc Ion Plating[J]. Journal of Inorganic Materials, 2010 , 25(5) : 517 -521 . DOI: 10.3724/SP.J.1077.2010.00517

References

[1]Robertson J. Diamond-like amorphous carbon.Materials Science and Engineering R,2002, 37(4/5/6):129-281
[2]Hainsworth S V, Uhure N J. Diamond like carbon coatings for tribology: production techniques, characterization methods and applications.International Materials Reviews,2007, 52(3):153-174
[3]Robertson J. Improving the properties of diamond-like carbon.Diamond and Related Materials,2003, 12(2):79-84
[4]Liu E, Shi X, Tan H S, et al. The effect of nitrogen on the mechanical properties of tetrahedral amorphous carbon films deposited with a filtered cathodic vacuum arc.Surface and Coatings Technology,1999, 120-121:601-606
[5]Tan M L, Zhu J Q, Han J C, et al. Raman characterization of boron doped tetrahedral amorphous carbon films.Materials Research Bulletin,2008, 43(2):453-462
[6]Lee C S, Lee K R, Eun K Y, et al. Structure and properties of Si incorporated tetrahedral amorphous carbon films prepared by hybrid filtered vacuum arc process.Diamond and Related Materials,2002, 11(2):198-203
[7]Singh V, Jiang J C, Meletis E I. Cr-diamondlike carbon nanocomposite films:Synthesis, characterization and properties.Thin Solid Films,2005, 489(1/2):150-158
[8]Wang D Y, Chang C L, Ho W Y. Oxidation behavior of diamond-like carbon films.Surface and Coatings Technology,1999, 120-121:138-144
[9]Inkin V N, Kirpilenko G G, Dementjev A A, et al. A superhard diamond-like carbon film.Diamond and Related Materials,2000, 9(3-6):715-721
[10]Byon E, Kim J K, Rha J J, et al. Effect of metal ion implantation on thermal instability of diamond-like carbon films.Surface & Coatings Technology,2007, 201(15):6670-6673
[11]Chen C C, Hong F C N. Structure and properties of diamond-like carbon nanocomposite films containing copper nanoparticles.Applied Surface Science,2005, 242(3/4):261-269
[12]Veprek S, Reiprich S. A concept for the design of novel superhard coatings.Thin Solid Films,1995, 268(1/2):64-71
[13]Musil J. Hard and superhard nanocomposite coatings.Surface and Coatings Technology,2000, 125(1/2/3):322-330
[14]Ferrari A C, Robertson J. Interpretation of Raman spectra of disordered and amorphous carbon.Physical Review B,2000, 61(20):14095-14107
[15]蒋娜娜, 邵天敏, 陈大融(JIANG Na-Na, et al). 利用脉冲激光真空弧沉积技术制备类金刚石薄膜.无机材料学报(Journal of Inorganic Materials), 2005, 20(1):187-192.
[16]Ferrari A C. Determination of bonding in diamond-like carbon by Raman spectroscopy.Diamond and Related Materials,2002, 11(3-6):1053-1061
[17]Tay B K, Cheng Y H, Ding X Z, et al. Hard carbon nanocomposite films with low stress.Diamond and Related Materials,2001,10(3-7):1082-1087
[18]Zhang S, Sun D, Fu Y Q, et al. Recent advances of superhard nanocomposite coatings: a review.Surface and Coatings Technology,2003, 167(2/3):113-119
[19]赵红雨, 范秋林, 宋力昕, 等(ZHAO Hong-Yu, et al). 纳米复合超硬薄膜的研究现状.无机材料学报(Journal of Inorganic Materials), 2004, 19(1):9-16.
[20]Veprek S. The search for novel, superhard materials.Journal of Vacuum Science and Technology A,1999, 17(5):2401-2420

Outlines

/