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Journal of Inorganic Materials

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2010 , Vol. 25 >Issue 3: 242 - 246

DOI: https://doi.org/10.3724/SP.J.1077.2010.00242

Research Paper

Investigation of Structural and Physical Properties of Pt/Pb(Zr 0.4 Ti 0.6 )O3/ITO Capacitors Fabricated on Glass Substrate

  • ZHOU Yang ,
  • CHENG Chun-Sheng ,
  • ZHAO Jing-Wei ,
  • ZHENG Hong-Fang ,
  • ZHAO Qing-Xun ,
  • PENG Ying-Cai ,
  • LIU Bao-Ting
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  • 1. College of Physics Science and Technology,Hebei University, Baoding 071002, China; 2. Baoding University, Baoding 071000, China; 3. College of Electronic and Information Engineering, Hebei University, Baoding 071002, China

Received date: 2009-07-14

  Revised date: 2009-10-15

  Online published: 2010-03-20

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Abstract

Pt/Pb(Zr0.4Ti0.6)O3 (PZT)/ITO capacitors were fabricated on glass substrate, where PZT film was prepared by solgel method. The structural and physical properties of Pt/PZT/ITO capacitors were investigated. The microstructural, electrical and optical properties of Pt/PZT/ITO capacitors were characterized by Xray diffraction (XRD), ferroelectric tester, UVspectrophotometer, respectively. It is found that PZT is highly (101) oriented and well crystallized. Ferroelectric measurements indicate that Pt/PZT/ITO capacitor, measured at 5V, possesses good ferroelectric properties, such as fatiguefree characteristics, retention characteristics, large remnant polarization (41.7μC/cm2 ) and high resistivity (2.5×109Ω·cm). The analysis of the leakage current mechanism indicates that Pt/PZT/ITO capacitor showes Ohmiclike behaviour at low voltages (<0.8V) and Schottky emission at high voltages (>0.8V). From the optical measurement, stronger absorption in shortwave and stronger transmission in longwave range are observed. The maximum value of transmission reaches 95%.

Key words： Pt/PZT/ITO; sol-gel method; electric property

Cite this article

ZHOU Yang , CHENG Chun-Sheng , ZHAO Jing-Wei , ZHENG Hong-Fang , ZHAO Qing-Xun , PENG Ying-Cai , LIU Bao-Ting . Investigation of Structural and Physical Properties of Pt/Pb(Zr 0.4 Ti 0.6 )O3/ITO Capacitors Fabricated on Glass Substrate[J]. Journal of Inorganic Materials, 2010 , 25(3) : 242 -246 . DOI: 10.3724/SP.J.1077.2010.00242

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