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Journal of Inorganic Materials

Journal of Inorganic Materials >

2008 , Vol. 23 >Issue 2: 361 - 363

DOI: https://doi.org/10.3724/SP.J.1077.2008.00361

Research Paper

Deposition of Low Resistive Transparent Conducting ZnxCd1-xO Films on Flexible PET Substrate at Low Temperature

  • JI Zhen-Guo ,
  • CHEN Ming-Mei ,
  • ZHANG Pin ,
  • ZHOU Qiang
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  • 1. Institute of Electronic Information, Hangzhou Dianzi University, Hangzhou 310018, China; 2. State Key Laboratory for Silicon Materials, Zhejiang University, Hangzhou 310027, China

Received date: 2004-04-06

  Revised date: 2007-05-31

  Online published: 2008-03-20

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Abstract

Low resistivity transparent conducting ZnxCd1-xO films were deposited on flexible Polyethylene Terephthalate(PET) substrates by DC magnetron sputtering. Structural, electrical, and optical properties of the films with different Zn concentrations were investigated. XRD results show that for x0.5, the structure of the film is in CdO phase, while for x>0.5, oriented ZnO phase is dominant. Hall results shows that the ZnxCd1-xO films has very high carrier concentration when x≤0.5, and the electrical resistivitiy of the films is at the order of 10-3Ω·cm. Carrier mobility shows a maximum value at x=0.5. The transmittance of the ZnxCd1-xO films in the visible range is much higher than that of pure CdO film. It’s concluded that x=0.5 is the optimal value at which low electrical resistive, high visible transmittance ZnxCd1-xO films can be deposited at low temperature on flexible substrates.

Key words： DC magnetron sputtering; flexible substrate; ZnCdO films; transparent conductive films

Cite this article

JI Zhen-Guo , CHEN Ming-Mei , ZHANG Pin , ZHOU Qiang . Deposition of Low Resistive Transparent Conducting ZnxCd1-xO Films on Flexible PET Substrate at Low Temperature[J]. Journal of Inorganic Materials, 2008 , 23(2) : 361 -363 . DOI: 10.3724/SP.J.1077.2008.00361

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