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Journal of Inorganic Materials

Journal of Inorganic Materials >

2008 , Vol. 23 >Issue 2: 277 - 280

DOI: https://doi.org/10.3724/SP.J.1077.2008.00277

Research Paper

Microwave Electromagnetic Properties of Discontinuous CoFeB-SiO2 Magnetic Multilayer Films

  • JIANG Jian-Jun ,
  • MA Qiang ,
  • BIE Shao-Wei ,
  • DU Gang ,
  • LIANG Pei ,
  • HE Hua-Hui
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  • Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China

Received date: 2007-05-21

  Revised date: 2007-07-04

  Online published: 2008-03-20

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Abstract

A series of multilayers of CoFeB-SiO2 was fabricated by using DC/RF magnetron sputtering, and then annealed in vacuum at different temperatures. The results show that microstructures and electromagnetic properties of the CoFeB-SiO2 multilayer films can be altered by varying the volume fraction of SiO2 and the annealing temperature. High permeability along with high magnetic loss in the GHz frequency range is achieved in the optimized discontinuous multilayer films. Both real and imaginary part of the complex permeability are larger than 260 at 1.5GHz for these films, and the resistivity is as high as 1.38mΩ·cm. The CoFeB-SiO2 multilayers are supposed to serve as the microwave absorbers in GHz range.

Key words： CoFeB-SiO2; discontinuous multilayer; microwave electromagnetic; complex permeability

Cite this article

JIANG Jian-Jun , MA Qiang , BIE Shao-Wei , DU Gang , LIANG Pei , HE Hua-Hui . Microwave Electromagnetic Properties of Discontinuous CoFeB-SiO2 Magnetic Multilayer Films[J]. Journal of Inorganic Materials, 2008 , 23(2) : 277 -280 . DOI: 10.3724/SP.J.1077.2008.00277

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