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Journal of Inorganic Materials

Journal of Inorganic Materials >

2008 , Vol. 23 >Issue 1: 180 - 184

DOI: https://doi.org/10.3724/SP.J.1077.2008.00180

Research Paper

Spectroscopic Characterization of Boron Doped Tetrahedral Amorphous Carbon

  • ZHANG Hua-Yu ,
  • TAN Man-Lin ,
  • HAN Jie-Cai ,
  • ZHU Jia-Qi ,
  • JIA Ze-Chun
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  • (1. Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, China; 2. Center for Composite Materials, Harbin Institute of Technology, Harbin 150001, China)

Received date: 2007-02-06

  Revised date: 2007-03-28

  Online published: 2008-01-20

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Abstract

A set of boron doped tetrahedral amorphous carbon (ta-C:B) films were prepared in a filtered cathodic vacuum arc system using boron mixed graphite as targets with weight percentage ranging from 0 to 15%. The chemical bonding states of ta-C:B were studied by X-ray photoelectron spectroscope. The result shows that B is mainly threefold coordinated and the fraction of sp3 hybridized carbon decreases in magnitude with increasing boron content. Raman analysis also shows that the introduction of B in the ta-C:B films facilitates the clustering of sp2 carbon sites which reduces the bonding distortion and intrinsic stress of the films.

Key words： tetrahedral amorphous carbon; XPS; Raman spectrum

Cite this article

ZHANG Hua-Yu , TAN Man-Lin , HAN Jie-Cai , ZHU Jia-Qi , JIA Ze-Chun . Spectroscopic Characterization of Boron Doped Tetrahedral Amorphous Carbon[J]. Journal of Inorganic Materials, 2008 , 23(1) : 180 -184 . DOI: 10.3724/SP.J.1077.2008.00180

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