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Journal of Inorganic Materials

Journal of Inorganic Materials >

2009 , Vol. 24 >Issue 5: 1041 - 1044

DOI: https://doi.org/10.3724/SP.J.1077.2009.01041

Research Paper

Manufacturing and Analysis of Low-loss Ion-exchanged Glass-based Waveguide

  • HAO Yin-Lei ,
  • ZHENG Wei-Wei ,
  • JIANG Shu-Hang ,
  • GU Jin-Hui ,
  • SUN Yi-Ling ,
  • YANG Jian-Yi ,
  • LI Xi-Hua ,
  • ZHOU Qiang ,
  • JIANG Xiao-Qing ,
  • WANG Ming-Hua
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  • （Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China）

Received date: 2008-12-26

  Revised date: 2009-04-13

  Online published: 2009-09-20

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Abstract

Silicate glass of system SiO2-B2O3-Al2O3-R’O-R2O（R’=Ca, Mg; R=Na, K）was designed and melted for ion-exchanged integrated optical waveguide chip, on consideration of the suitability of ion-exchange and ion-diffusion process on this glass substrate, buried channel waveguide was manufactured by Ag+/Na+ ion-exchange in mixed melted salts, and subsequently field-assisted ion-diffusion process. Observation of optical microscope and electron microprobe show that Ag+ diffusion zone is driven to approximately 10μm under the glass substrate surface. The Ag+ diffusion zone possesses higher refractive index than glass substrate, and thus acts as the waveguide core. This waveguide core is typically in dimension of 8μm×8μm, matching well with that of single-mode-fiber core, which ensures a low coupling loss. Propagation loss and coupling loss with single-mode-fiber is measured to be 0.1dB/cm and 0.2-0.3dB/facet respectively, at the wavelength of 1.55μm. The propagation loss is very close to glass material inhere loss at the same wavelength, a typical characteristics of buried waveguide. It shows that the waveguide manufacturing process is promising for implementation of low-loss integrated optical devices.

Key words： ion-exchange; glass; optical waveguide

Cite this article

HAO Yin-Lei , ZHENG Wei-Wei , JIANG Shu-Hang , GU Jin-Hui , SUN Yi-Ling , YANG Jian-Yi , LI Xi-Hua , ZHOU Qiang , JIANG Xiao-Qing , WANG Ming-Hua . Manufacturing and Analysis of Low-loss Ion-exchanged Glass-based Waveguide[J]. Journal of Inorganic Materials, 2009 , 24(5) : 1041 -1044 . DOI: 10.3724/SP.J.1077.2009.01041

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