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Journal of Inorganic Materials

Journal of Inorganic Materials >

2007 , Vol. 22 >Issue 5: 769 - 774

DOI: https://doi.org/10.3724/SP.J.1077.2007.00769

Research Paper

Recent Developments of Surface Coatings and Optical Fabrication of Silicon Carbide

  • LIU Gui-Ling ,
  • HUANG Zheng-Ren ,
  • LIU Xue-Jian ,
  • DONG Shao-Ming ,
  • JIANG Dong-Liang
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  • (1. Structural Ceramics Engineering Center of Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China; 2. Graduate University of the Chinese Academy of Sciences, Beijing 100049, China)

Received date: 2006-09-20

  Revised date: 2006-11-16

  Online published: 2007-09-20

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Abstract

Surface coating and exploring new fabrication methods are two kinds of ordinary processes to achieve the fine optical surface of silicon carbide. Two main coating techniques of silicon carbide-based materials, CVD SiC and PVD Si on SiC surface are introduced, and the recent developments of silicon carbide optical fabrication methods are reviewed in detail.

Key words： silicon carbide; surface coatings; optical fabrication

Cite this article

LIU Gui-Ling , HUANG Zheng-Ren , LIU Xue-Jian , DONG Shao-Ming , JIANG Dong-Liang . Recent Developments of Surface Coatings and Optical Fabrication of Silicon Carbide[J]. Journal of Inorganic Materials, 2007 , 22(5) : 769 -774 . DOI: 10.3724/SP.J.1077.2007.00769

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