Cleaning Methods for Multilayer Dielectric Pulse Compression Gratings

doi:10.15541/jim20190054

Journal of Inorganic Materials ›› 2019, Vol. 34 ›› Issue (12): 1285-1289.DOI: 10.15541/jim20190054

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Cleaning Methods for Multilayer Dielectric Pulse Compression Gratings

ZOU Xi^1,^2,^3,⁴,JIN Yun-Xia^1,²,KONG Fan-Yu^1,²,WANG Yong-Lu^1,²,ZHANG Yi-Bin^1,²,SHAO Jian-Da^1,²()

^1. Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
^2. Key Laboratory of Materials for High Power Laser, Chinese Academy of Sciences, Shanghai 201800, China
^3. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
^4. School of Physical Science and Technology, Shanghai Tech University, Shanghai 201210, China

Received:2019-01-28 Revised:2019-03-08 Published:2019-12-20 Online:2019-05-29
Supported by:
National Natural Science Foundation of China(11604352);National Natural Science Foundation of China(61875212);Science and Technology Commission of Shanghai Municipality(16JC1420600)

Abstract

Abstract:

Two cleaning methods for multilayer dielectric pulse compression gratings (MDG) were studied. The first method is SPM (Sulfuric-Peroxide Mixtures, 98wt%H₂SO₄+30wt%H₂O₂) + megasonic, and the second method is Oxygen plasma + HPM (Hydrochloric/Peroxide Mixture, 37wt%HCl+30wt%H₂O₂+DIH₂O) + megasonic. To compare the cleaning effectiveness, the element content of sample surface, diffraction efficiency, surface roughness, temperature rising and laser damage induced threshold (LIDT) were measured. The 1-on-1 LIDT of samples cleaned by the first and the second methods are 7.55 and 5.32 J/cm ² respectively, with 1064 nm laser pulse (12 ns, s-polarized) at incidence angle of 70°. In addition, the sample cleaned by the second method has lower surface contamination content, but the sample cleaned by the first method has better performance in diffraction efficiency, surface roughness and temperature rising. By further analyzing, we find that element Fe brought by oxygen plasma cleaning process in the second method is the factor that affects the damage performance and temperature rising. Therefore, the cleaning method based on the first one, the SPM + megasonic is better for improving the laser damage performance of MDG.

Key words: multilayer dielectric, pulse compression grating, oxygen plasma, SPM, HPM

CLC Number:

TH745

ZOU Xi, JIN Yun-Xia, KONG Fan-Yu, WANG Yong-Lu, ZHANG Yi-Bin, SHAO Jian-Da. Cleaning Methods for Multilayer Dielectric Pulse Compression Gratings[J]. Journal of Inorganic Materials, 2019, 34(12): 1285-1289.

Figures/Tables 9

Fig. 1 Fabrication process of multilayer dielectric pulse compression grating

Fig. 2 Cleaning processes of two cleaning methods

Fig. 3 Element contents and surface contaminants (SC) contents of uncleaned sample and cleaned samples by two cleaning methods

Fig. 4 The -1st diffraction efficiencies (DE) of uncleaned sample and cleaned samples by two cleaning methods

Fig. 5 Surface morphologies of uncleaned sample and cleaned samples by two cleaning methods measured by AFM

Fig. 6 Surface temperature of the uncleaned samples and cleaned samples by two cleaning methods changed with the laser power

Fig. 7 The laser damage testing system

Table 1 Laser damage threshold of samples cleaned by two cleaning methods

Cleaning method	SPM (method 1)	Oxygen plasma + HPM (method 2)
LIDT/(J?cm^-2)	7.55	5.32

Table 2 Content of Fe element after the single step in cleaning method

Cleaning process	Post-oxygen plasma	Post-HPM
Fe/at%	7.55	2.1

References 19

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Cleaning Methods for Multilayer Dielectric Pulse Compression Gratings

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