A Technique of Burn-out for Low Temperature Cofired AlN Multilayer Substrates

Journal of Inorganic Materials

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A Technique of Burn-out for Low Temperature Cofired AlN Multilayer Substrates

WU Yin; ZHOU He-Ping; LIU Yan-Cheng; MIAO Wei-Guo

State Key Laboratory of New Ceramics and fine Precessing; Dept. of Materials Science and Engineering; Tsinghua University Beijing 100084 China

Received:1997-06-11 Revised:1997-07-02 Published:1998-06-20 Online:1998-06-20

Abstract

Abstract: A technique of burn-out for low temperature cofired AlN multilayer substrates was introduced,which consist of high thermal conductivity AlN ceramics and metal W. The effect of the evolutionof carbon during burn-out on AlN sintering characteristics and microstructure was studied. Theresults showed that two-step burn-out process may solve the contradiction between W oxidationand residual carbon.

Key words: aluminium nitride, low temperature cofire, binder burn-out, residual carbon

CLC Number:

TM201

WU Yin,ZHOU He-Ping,LIU Yan-Cheng,MIAO Wei-Guo. A Technique of Burn-out for Low Temperature Cofired AlN Multilayer Substrates[J]. Journal of Inorganic Materials.

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A Technique of Burn-out for Low Temperature Cofired AlN Multilayer Substrates

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