Abstract: Rutile titanium oxide films on silicon substrate were prepared by unbalanced reactive pulsed magnetron sputtering and subsequently modified by hydrogen plasma reduction. The XRD patterns show that the modified titanium oxide films consist of single rutile phase, which is similar to as-deposited films. FTIR results exhibit that no obvious -OH groups exist in the films. XPS spectra display that oxygen deficiency exist in the film after hydrogen plasma reduction. The wettability experiment show that the hydrophilicity of the hydrogen plasma modified Ti-O films decreases slightly. The anticoagulation property of Ti-O films modified at lower temperature in short time (110℃, 15min) is obviously improved, which is related to the content of oxygen deficiency. Consequently hydrogen introducing is an effective way to improve the anticoagulation property of titanium oxide films.

Key words: titanium oxide film, hydrogen reduction, anticoagulation property, UBMS, XPS