Journal of Inorganic Materials

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Spectroscopic Ellipsometry Studies of Ba0.9Sr0.1Ti03 Thin Films

YANG Sheng-Hong1; LI Hui-Qiu1; ZHANG Yue-Li1; MO Dang1; TIAN Hu-Yong2; LUO Wei-Gen2; PU Xing-Hua2; DING Al-Li2   

  1. 1. Department of Physics; Zhongshan University; Guangzhou 510275; China; 2. Laboratory of Functional Inorganic Materials; Chinese Academy of Science, Shanghai 200050, China
  • Received:2000-04-04 Revised:2000-05-19 Published:2001-03-20 Online:2001-03-20

Abstract: Ellipsometric spectra of Ba0.9Sr0.1TiO3 (BST) thin films with various annealing
temperatures were measured in the range of photon energy from 2.1 to 5.2eV. Constructing appropriate fitting models and describing optical properties
of the BST with Cauchy dispersion model, their optical constants (refractive index n and extinction coefficient k) spectra and band
gap Eg were determined by means of an optimization. Compared these results, we obtained the variation of the refractive index n,
the extinction coefficient k and the band gap Eg with annealing temperatures.

Key words: spectroscopic ellipsometry, optical constant spectra, BST films

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