Journal of Inorganic Materials

• Research Paper • Previous Articles     Next Articles

Low-T Sintering, Low-Dielectric Materials for High Frequency Multilayer Chip Inductors

LUO Ling-Hong1,2, ZHOU He-Ping1, PENG Rong1, QIAO Liang1   

  1. 1. State Key Lab of New Ceramic and Fine Processing, Department of Materials Science and Engineering Tsinghua University, Beijing 100084, China; 2. Dempartment of Materials Engineering, Jing-De-Zhen Ceramics Institure, Jingdezhen 333001, China
  • Received:2001-05-11 Revised:2001-06-11 Published:2002-05-20 Online:2002-05-20

Abstract: The low temperature sintering and low dielectric properties ceramic materials of “borosilicate glass+
alpha-quartz+zinc silicate” system were prepared by applying the principle of the componund structure. The crystal phases, dielectric properties and
microstructure of the all sintering samples were analyzed by X-ray diffraction (XRD), HP4194ALCR analyzer and scanning electron microscopy
(SEM) respectively. The results show these materials possess very low dielectric constant (K=4~5, 1MHz)and very low dissipation factor
(tanδ<0. 001, 1MHz)in high frequencies. And they can be sintered below 900℃. These materials are promising dielectric materials
for high frequencies(≥1GHz) mulitlayer chip inductors (MLCIs). In the mean while, new crystalline phase of cristobalite is formed during
re-sintering the borosilicate glass and ZnSiO_3 phase is formed from zinc silicate visa zinc ions melting into the glass net. Zinc silicate
phase is of an aid-sintering function. The changes of dielectric properties of the samples with frequencies are fit with Debye equation.

Key words: borosilicate glass+alpha quartz+zinc silicate ", dielectric materials, high frequency MLCIs

CLC Number: