Abstract: Combinatorial materials synthesis methods and high throughput screening techniques have been
developed to accelerate the process of materials discovery and optimization. In order to apply combinatorial strategies for the innovative materials
technology successfully, there are three main stages involved, that is: (i) design of the material chip; (ii) high throughput synthesis of the
chip; and (iii) rapid characterization of the chip,i.e. high throughput screening. Further more,high throughput screening is the most important
component of combinatorial materials science and technology, it is a major limitation at present. This paper summarizes varieties of high throughput
screening methods including microspot X-ray methods, optical measurement techniques, and a novel evanescent microwave microscope used to characterize
structural, optical, magnetic, and electrical properties of samples on inorganic material chips.

Key words: combinatorial, high throughput screening, photoluminescence, electro/magneto-optical, SEMM（scanning evanescent microwave microscope）