HWP-CVD氮化硅薄膜的结构和光学特性
于威,侯海虹,何杰,王华英,傅广生
Microstructure and Optical Properties of Hydrogenated Amorphous Silicon Nitride Films Deposited by Helicon Wave Plasma Enhanced Chemical Vapor Deposition
YU Wei,HOU Hai-Hong,HE Jie,WANG Hua-Ying,FU Guang-Sheng
无机材料学报
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2004, (4): 907
-911
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