a-C:H(N)薄膜的制备及性能

程宇航,吴一平,陈建国,乔学亮,谢长生,许德胜

Deposition and Properties of a C:H(N) Films

CHENG Yu-Hang,WU Yi-Ping,CHEN Jian-Guo,QIAO Xue-Liang,XIE Cang-Sheng,XU De-Sheng

无机材料学报 . 1999, (4): 601 -606 .