鼓泡化学气相沉积法制备褶皱六方氮化硼薄膜

戴宗润, 时志远, 朱昱霖, 何朋, 于庆凯

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DAI Zongrun, SHI Zhiyuan, ZHU Yulin, HE Peng, YU Qingkai

无机材料学报 . . DOI: 10.15541/jim20260206