CVD金刚石膜应力的产生、抑制、应用及测量
李成明, 周闯, 刘鹏, 郑礼平, 赖泳机, 陈良贤, 刘金龙, 魏俊俊
Generation, Suppression, Application and Measurement of Stress in CVD Diamond Films
LI Chengming, ZHOU Chuang, LIU Peng, ZHENG Liping, LAI Yongji, CHEN Liangxian, LIU Jinlong, WEI Junjun
无机材料学报
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DOI: 10.15541/jim20250094
