原子层沉积法制备稀土氧化物表面改性多孔SiO2薄膜
金剑飞, 吕林, 李莹, 闫璐, 曹韫真, 李伟
Rare Earth Oxide Surface Modification of Porous SiO2 Film Prepared by Atomic Layer Deposition
JIN Jianfei, LÜ Lin, LI Ying, YAN Lu, CAO Yunzhen, LI Wei
无机材料学报
.
0, (): 2
-2
.
DOI: 10.15541/jim20240433
|
|
|
