Ti-DLC薄膜压阻性能及载流子输运行为研究
赵志翰, 郭鹏, 魏菁, 崔丽, 刘山泽, 张文龙, 陈仁德, 汪爱英
Ti Doped Diamond Like Carbon Films: Piezoresistive Properties and Carrier Transport Behavior
ZHAO Zhihan, GUO Peng, WEI Jing, CUI Li, LIU Shanze, ZHANG Wenlong, CHEN Rende, WANG Aiying
无机材料学报
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2024, (8): 879
-886
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DOI: 10.15541/jim20240005
