低位错密度8英寸导电型碳化硅单晶衬底制备
熊希希, 杨祥龙, 陈秀芳, 李晓蒙, 谢雪健, 胡国杰, 彭燕, 于国建, 胡小波, 王垚浩, 徐现刚
Fabrication of 8-inch N-type 4H-SiC Single Crystal Substrate with Low Dislocation Density
XIONG Xixi, YANG Xianglong, CHEN Xiufang, LI Xiaomeng, XIE Xuejian, HU Guojie, PENG Yan, YU Guojian, HU Xiaobo, WANG Yaohao, XU Xiangang
无机材料学报
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2023, (11): 1371
-1372
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DOI: 10.15541/jim20230325
