氩离子刻蚀对TFA-MOD法YBa2Cu3O7-x薄膜性能的影响研究
罗志永, 廖楚剑, 蔡传兵, 刘志勇, 李敏娟, 鲁玉明
Argon Ion Etching on Property of YBa2Cu3O7-x Thin Films Prepared by TFA-MOD Process
LUO Zhi-Yong, LIAO Chu-Jian, CAI Chuan-Bing, LIU Zhi-Yong, LI Min-Juan, LU Yu-Ming
无机材料学报
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2019, (12): 1279
-1284
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DOI: 10.15541/jim20190102
