不同厚度四面体非晶碳薄膜的高通量制备及表征
魏菁, 李汉超, 柯培玲, 汪爱英
Characterization of Tetrahedral Amorphous Carbon Film with Various Thickness by High Through-put Method
WEI Jing, LI Han-Chao, KE Pei-Ling, WANG Ai-Ying
无机材料学报
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2018, (11): 1173
-1178
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DOI: 10.15541/jim20180027
