氟化镁基底上HfO2中间层对Al2O3薄膜微观组织和力学性能的影响
宋 博, 赵丽丽, 陈笑迎, 游丽君, 宋力昕
Effects of HfO2 Interlayer on Microstructure and Mechanical Property of Al2O3 Thin Film on MgF2 Substrate
SONG Bo, ZHAO Li-Li, CHEN Xiao-Ying, YOU Li-Jun, SONG Li-Xin
无机材料学报
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2016, (7): 779
-784
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DOI: 10.15541/jim20160030
