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无机材料学报
六甲基二硅胺烷(HMDS)为原料CVD制备硅基纳米粉体的研究
江东亮,陆忠乾,黄政仁,严东生
Preparation of Si-based Nano-powders from ((CH3)3Si)2NH by CVD
JIANG Dongliang,LU Zhongqian,HUANG Zhengren,YAN Dongsheng
无机材料学报 . 1997, (3): 356 -362 .