溅射工艺对SiCN薄膜沉积及光性能的影响

肖兴成,宋力昕,江伟辉,彭晓峰,胡行方

Influence of Sputtering Process on the Deposition and Optical Properties of SiCN Films

XIAO Xing-Cheng,SONG Li-Xin,JIANG Wei-Hui,PENG Xiao-Feng,HU Xing-Fang

无机材料学报 . 2000, (4): 717 -721 .