氧分压对直流磁控溅射制备 ZnO:Ga透明导电薄膜特性的影响
马全宝,叶志镇,何海平,朱丽萍,张银珠,赵炳辉
Effects of Oxygen Partial Pressure on the Properties of Transparent Conductive ZnO:Ga Films Prepared by DC Reactive Magnetron Sputtering
MA Quan-Bao,YE Zhi-Zhen,HE Hai-Ping,ZHU Li-Ping,ZHANG Yin-Zhu,ZHAO Bing-Hui
无机材料学报
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2007, (6): 1113
-1116
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DOI: 10.3724/SP.J.1077.2007.01113
