PZT系多层片式压电陶瓷微驱动器位移性能研究

李国荣,陈大任,殷庆瑞

Displacement Characterization of the PZT-based Monolithic Multilayer Piezoelectric Actuators

LI Guo-Rong,CHEN Da-Ren,YIN Qing-Rui

无机材料学报 . 1999, (3): 418 -424 .