采用高温超高压(HT-HP)技术在4.5GPa/1250℃/20min工艺条件下制备了添加2wt% Al2O3助烧结剂的纳米SiC 陶瓷. 采用X射线粉末衍射(XRD)、X光电子能谱(XPS)、扫描电镜(SEM)、X射线能谱(EDX)、纳米压痕(Nano indenter)研究了烧结SiC陶瓷的物相 组成、晶粒大小、化学成分、微观结构、纳米压痕力学性能等. 结果表明: 采用超高压烧结, 可以在较低温度(1250±50℃)、较少烧结助剂用量下实现纳米SiC的致密烧结. 烧结体未发生相转变, 结构致密, 无孔隙, 晶粒尺寸为22nm, 晶格常数为0.4355nm;显微硬度为33.7GPa, 弹性模量为407GPa.
High-density SiC ceramics doped with 2wt% Al2O3 additives were fabricated by ultra-high
pressure and high temperature technique (4.5GPa,1250℃,20min). The structures, grain size, lattice parameters, chemical component, morphology and mechanical property of the sintered SiC ceramics were characterized by X-ray diffraction
(XRD), X-ray photoelectron energy spectroscope (XPS), scanning electron microscope (SEM), energy dispersive X-ray
spectroscope (EDX) and nano impress indenter. The results show that nano-SiC ceramic is fully densified by ultra-high
pressure technique at relative low temperature (1250±50℃). No phase transfer or holes is found in the sintered nano-SiC
ceramic. The hardness and elastic modulus of the sintered SiC ceramic with grain size of 22nm and lattice parameters of 0.4355nm are 33.7GPa and 407GPa, respectively.
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