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2008 , Vol. 23 >Issue 1: 180 - 184

DOI: https://doi.org/10.3724/SP.J.1077.2008.00180

研究论文

掺硼四面体非晶碳膜的微观结构及光谱表征

  • 张化宇 ,
  • 檀满林 ,
  • 韩杰才 ,
  • 朱嘉琦 ,
  • 贾泽纯
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  • (1. 哈尔滨工业大学深圳研究生院, 深圳 518055; 2. 哈尔滨工业大学复合材料与结构研究所, 哈尔滨 150001)

收稿日期: 2007-02-06

  修回日期: 2007-03-28

  网络出版日期: 2008-01-20

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Spectroscopic Characterization of Boron Doped Tetrahedral Amorphous Carbon

  • ZHANG Hua-Yu ,
  • TAN Man-Lin ,
  • HAN Jie-Cai ,
  • ZHU Jia-Qi ,
  • JIA Ze-Chun
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  • (1. Shenzhen Graduate School, Harbin Institute of Technology, Shenzhen 518055, China; 2. Center for Composite Materials, Harbin Institute of Technology, Harbin 150001, China)

Received date: 2007-02-06

  Revised date: 2007-03-28

  Online published: 2008-01-20

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摘要

分别采用过滤阴极真空电弧技术制备了不同含硼量四面体非晶碳(ta-C:B)膜, 并用X射线光电子能谱(XPS)、Raman光谱对薄膜的微观结构和化学键态进行了研究. XPS分析表明薄膜中B主要以石墨结构形式存在, 随着B含量的增加, sp3杂化碳的含量逐渐减小, Ta-C:B膜的Raman谱线在含硼量较高时, 其D峰和G峰向低频区偏移, 且G峰的半峰宽变窄, 表明B的引入促进了sp2杂化碳的团簇化, 减小了原子价键之间的变形, 从而降低了薄膜的内应力．

关键词： 四面体非晶碳(ta-C); XPS; Raman光谱

本文引用格式

张化宇 , 檀满林 , 韩杰才 , 朱嘉琦 , 贾泽纯 . 掺硼四面体非晶碳膜的微观结构及光谱表征[J]. 无机材料学报, 2008 , 23(1) : 180 -184 . DOI: 10.3724/SP.J.1077.2008.00180

Abstract

A set of boron doped tetrahedral amorphous carbon (ta-C:B) films were prepared in a filtered cathodic vacuum arc system using boron mixed graphite as targets with weight percentage ranging from 0 to 15%. The chemical bonding states of ta-C:B were studied by X-ray photoelectron spectroscope. The result shows that B is mainly threefold coordinated and the fraction of sp3 hybridized carbon decreases in magnitude with increasing boron content. Raman analysis also shows that the introduction of B in the ta-C:B films facilitates the clustering of sp2 carbon sites which reduces the bonding distortion and intrinsic stress of the films.

Key words： tetrahedral amorphous carbon; XPS; Raman spectrum

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