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2008 , Vol. 23 >Issue 1: 125 - 129

DOI: https://doi.org/10.3724/SP.J.1077.2008.00125

研究论文

热键合制作Yb:Y3Al5O12/Y3Al5O12复合晶体

  • 王晓丹 ,
  • 赵志伟 ,
  • 王静雅 ,
  • 徐军 ,
  • Gilbert Bourdet ,
  • J.-C. Chanteloup
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  • 1. 中国科学院上海光学精密机械研究所, 上海 201800; 2. 中国科学院研究生院, 北京 100049; 3. Ecole Polytechnique, Laboratoire pour l’Utilisation des Lasers Intenses, Route de Saclay, Palaiseau 91128, France

收稿日期: 2007-02-05

  修回日期: 2007-03-19

  网络出版日期: 2008-01-20

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Composite Yb:Y3Al5O12/Y3Al5O12 Crystal Prepared by Thermal Bonding

  • WANG Xiao-Dan ,
  • ZHAO Zhi-Wei ,
  • WANG Jing-Ya ,
  • XU Jun ,
  • Gilbert Bourdet ,
  • J.-C. Chanteloup
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  • 1. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China; 2. Graduate University of the Chinese Academy of Sciences, Beijing 100049, China; 3. Ecole Polytechnique, Laboratoire pour l’Utilisation des Lasers Intenses, Route de Saclay, Palaiseau 91128, France

Received date: 2007-02-05

  Revised date: 2007-03-19

  Online published: 2008-01-20

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摘要

采用热键合技术制备了Yb:Y3Al5O12/Y3Al5O12(Yb:YAG/YAG)复合晶体, 对复合晶体进行了结构表征和键合质量检测. 利用光学显微镜和扫描电镜观察了复合晶体横截面的形貌; 在偏光显微镜下观察键合区域的应力, 利用干涉条纹来表征复合晶体的光学均匀性; 通过红外透过光谱的测量来检测复合晶体的键合质量. 实验结果表明: 热键合技术制备的Yb:YAG/YAG复合晶体键合界面处无界面缺陷, 不存在复合界面空间过渡层, 光学均匀性良好.

关键词： Yb:YAG/YAG; 键合质量; 应力; 光学均匀性; 热键

本文引用格式

王晓丹 , 赵志伟 , 王静雅 , 徐军 , Gilbert Bourdet , J.-C. Chanteloup . 热键合制作Yb:Y3Al5O12/Y3Al5O12复合晶体[J]. 无机材料学报, 2008 , 23(1) : 125 -129 . DOI: 10.3724/SP.J.1077.2008.00125

Abstract

The composite Yb:Y3Al5O12/Y3Al5O12 crystal was made by thermal bonding method. Structure and bonding quality of composite crystal were characterized in detail. The cross section of the composite crystal was observed by optical microscope and scanning electron microscope (SEM), the stress in bonding area was observed by micropolariscope; optical homogeneity of the composite crystal was characterizated by interference fringe; bonding quality of the composite crystal was also studied by infrared transmission spectra. All experiments show that the composite Yb:YAG/YAG crystal has no interface defects, and no space transition layer in bonding area. The composite crystal has good optical
homogeneity.

Key words： Yb:YAG/YAG; bonding quality; stress; optical homogeneity; thermal bonding

参考文献

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