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无机材料学报

无机材料学报

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AIN陶瓷氧化行为的研究

许昕睿; 严伟林; 庄汉锐; 李文兰; 徐素英   

  1. 中国科学院上海硅酸盐研究所 上海 200050
  • 收稿日期:2002-01-24 修回日期:2002-03-12 出版日期:2003-03-20 网络出版日期:2003-03-20

Oxidation Behavior of Aluminium Nitride

XU Xin-Rui; YAN Wei-Lin; ZHUANG Han-Rui; LI Wen-Lan; XU Su-Ying   

  1. Shanghai Institute of Ceramics; Chinese Academy of Sciences; Shanghai 200050; China
  • Received:2002-01-24 Revised:2002-03-12 Published:2003-03-20 Online:2003-03-20

PDF (PC)

1268

被引次数

8

摘要： 探索了AIN陶瓷在不同烧结气氛、湿气及不同温度下的氧化行为和机理.结果表明:湿气的存在显著地影响了AIN陶瓷的氧化行为,1225℃,AIN陶瓷在湿氮气、湿氮气:氧气=10:1及湿空气条件下的氧化遵循抛物线性规律,而干空气条件下遵循线性规律;空气中氧化时,AIN陶瓷的氧化曲线在1100～1300℃表现为线性,当温度超过1300℃时,氧化曲线表现出抛物线性的规律,其线性氧化过程的反应活化能为233kJ/mol.

关键词: AIN陶瓷, 氧化行为, 线性规律, 抛物线性规律

Abstract: The effects of atmosphere and humidity at different temperatures on the behavior of aluminium nitride were investigated. The resules obtained show that the oxidation behavior was greatly affected by the humidity. The oxidation of aluminium nitride at 1225℃ in wet N2, wet N2:O2=10:1 and wet air follows a parabolic rate law, while the oxidation in dry air follows a linear rate law. On the other hand, the oxidation kinetics in dry air is linear between 1100℃and 1300℃ with an activation energy of 233kJ/mol, and then arabolic above 1300℃

Key words: aluminium nitride, oxidation behavior, linear rate law, parabolic rate law

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