无机材料学报 ›› 2012, Vol. 27 ›› Issue (8): 871-875.DOI: 10.3724/SP.J.1077.2012.11607 CSTR: 32189.14.SP.J.1077.2012.11607

• 研究论文 • 上一篇    下一篇

耐摩擦和高透过SiO2/TiO2/SiO2-TiO2增透膜的设计和制备

叶龙强1, 张清华2, 张雨露1, 张欣向1, 江 波1   

  1. (1. 四川大学 化学学院, 绿色化学与技术教育部重点实验室, 成都610064; 2. 成都精密光学工程研究中心, 成都 610064)
  • 收稿日期:2011-09-29 修回日期:2011-11-14 出版日期:2012-08-20 网络出版日期:2012-07-09
  • 作者简介:叶龙强(1988-), 男, 硕士研究生. E-mail: scuyelongqiang@163.com
  • 基金资助:

    中央高校基本科研业务项目(2010SCU23003)

Design and Preparation of SiO2/TiO2/SiO2-TiO2 Antireflective Coatings with Excellent Abrasion-resistance and Transmittance via Sol-Gel Process

YE Long-Qiang1, ZHANG Qing-Hua2, ZHANG Yu-Lu1, ZHANG Xin-Xiang1, JIANG Bo1   

  1. (1. Key Laboratory of Green Chemistry and Technology, College of Chemistry, Sichuan University, Chengdu 610064, China;  2. Chengdu Fine Optical Engineering Reseach Center, Chengdu 610064, China)
  • Received:2011-09-29 Revised:2011-11-14 Published:2012-08-20 Online:2012-07-09
  • About author:YE Long-Qiang. E-mail: scuyelongqiang@163.com
  • Supported by:

    Foundation Research Funds for the Central University (2010SCU23003)

摘要: 通过膜层设计理论设计出以K9玻璃为基底的兼具高透过率和高耐摩擦性的三层宽带增透膜, 并通过溶胶-凝胶技术成功制备了所设计的增透膜. 以正硅酸乙酯(TEOS)和钛酸丁酯(TTIP)为前驱体、以盐酸为催化剂制得SiO2和TiO2溶胶. 将两种溶胶按一定比例混合得到SiO2-TiO2复合溶胶. 实验结果表明: 三层增透膜在可见光区的平均透过率达到98.7%, 与未镀膜的K9玻璃基片相比提高了7.1%. 增透膜经较强机械摩擦后透过率基本保持不变, 表明该增透膜具有优良的耐摩擦性. 采用六甲基二硅氮烷(HMDS)对增透膜表面进行进一步的修饰, 修饰后增透膜与水的接触角提高至94.3°, 增透膜的疏水性及环境稳定性得到较大的提高.

关键词: 膜层设计, 高透过率, 高耐摩擦性, HMDS, 耐环境性

Abstract: Triple-layer broadband antireflective (AR) coatings with excellent abrasion-resistance and transmittance were designed using the theory of optical coating design. And the designed coatings were prepared on K9 glass via Sol-Gel process in this work. SiO2 and TiO2 sols were prepared using tetraethylorthosilicate (TEOS) and titanium tetraisopropoxide (TTIP) as precursors, respectively, and hydrochloric acid as catalyst. It is found that the average transmittance of the AR coatings over the entire visible region can reach 98.7%, which is 7.1% higher than that at the blank K9 glass. Moreover the transmittance of the AR coating does not obviously decrease after abrasion test, showing the excellent abrasion-resistance of the AR coatings. Hexamethyldisiloxane (HMDS) is further used to modify the surface of the AR coatings, which greatly improves the hydrophobicity of the coatings, and thus gives the AR coatings excellent environmental resistance.

Key words: optical coating design, transmittance, abrasion-resistance, HMDS, environmental resistance

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