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无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

SnO2气敏元件烧结工艺与电性能关系的复阻抗分析

傅刚1,2; 陈志雄2; 张进修2   

  1. 1. 中山大学物理系, 广州 510275; 2. 广州师范学院物理系, 广州 510405
  • 收稿日期:1999-10-18 修回日期:1999-12-01 出版日期:2000-10-20 网络出版日期:2000-10-20

Complex Impedance Analysis for the Relationship of Calcining Process and Sensing Properties of SnO2 Gas Sensors

FU Gang1,2; CHEN Zhi-Xiong2; ZHANG Jin-Xiu 2   

  1. 1.Department of Physics; Zhongshan University; Guangzhou 510275 China; 2.Department of Physics; Guangzhou Normal University; Guangzhou 510405 China
  • Received:1999-10-18 Revised:1999-12-01 Published:2000-10-20 Online:2000-10-20

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摘要： 采用平面丝网印刷工艺制备ＳｎＯ２厚膜气敏试样，分别在不同烧结温度和保温时间下于空气中烧成，测量试样的灵敏度和稳定性，并通过复阻抗分析方法，研究ＳｎＯ２气敏元件烧结工艺和电性能的关系，探讨烧结工艺对敏感材料微结构的影响．结果表明，适当调整烧结工艺参数可以使元件既有较高的气体灵敏度又有良好的长期稳定性；复阻抗分析表明，随保温时间延长，试样的电阻－电抗曲线半圆弧的弥散角逐渐减小至零，说明适当延长保温时间使晶粒间界处的弛豫时间分布趋向一致，晶界处晶粒的接触形态以及开口气孔和缺陷的分布等更趋均一和稳定．

关键词: SnO2气敏元件, 厚膜, 烧结温度, 保温时间, 复阻抗分析

Abstract: The SnO2 thick film gas sensors were prepared by using a standard screen printing technology and calcined at different temperature and time. By measuring
the sensitivity and long-term stability and using complex impedance analysis, the effects of calcining temperature and time on sensing properties and microstructure
of the thick films were researched. Gas sensors with high sensitivity and long-term stability can be prepared by choicing suitable calcining process parameters. Complex
impedance analysis indicates that the depressed angles of semicircular arc will reduce to zero with the extension of calcining time. The reducing of depressed
angles means the distribution of relaxation time at the grain boundary becomes more uniform. This result shows that the distribution of defects and pores, and the grain
connected shapes at the grain boundary tend to be more uniform and stable with the extension of calcining time.

Key words: SnO2 gas sensor, thick film, calcining temperature, calcining time, complex impedance

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