聚酯基片上制备FeCoB-SiO2薄膜的微观结构与微波电磁特性

doi:10.3724/SP.J.1077.2010.01150

无机材料学报 ›› 2010, Vol. 25 ›› Issue (11): 1150-1154.DOI: 10.3724/SP.J.1077.2010.01150 CSTR: 32189.14.SP.J.1077.2010.01150

聚酯基片上制备FeCoB-SiO₂薄膜的微观结构与微波电磁特性

张丽¹, 朱致伟¹, 旷仁熊², 邓龙江¹

(1. 电子科技大学微电子与固体电子学院, 成都 610054; 2. 中国电子科技集团第二十九研究所, 成都 610036)

收稿日期:2010-02-12 修回日期:2010-05-28 出版日期:2010-11-20 网络出版日期:2010-11-01

Microstructural and Microwave Electromagnetic Properties of FeCoB-SiO₂ Film on PET Substrate

ZHANG Li¹, ZHU Zi-Wei¹, KUANG Ren-Xiong², DENG Long-Jiang¹

(1. School of Microelectronic and Solid State Electronic, University of Electronic Science and Technology of China, Chengdu 610054, China; 2. China Electronics Technology Group Corporation, No. 29 Research Institute, Chengdu 610036, China)

Received:2010-02-12 Revised:2010-05-28 Published:2010-11-20 Online:2010-11-01

摘要/Abstract

摘要： 基于射频磁控溅射法在柔性聚酯薄膜(PET)基片上制备FeCoB-SiO₂薄膜. 研究发现在PET基片上沉积的FeCoB-SiO₂薄膜呈非晶态, 其电阻率高达1755.73 μΩ·cm, 饱和磁化强度为0.7 T. 由于非磁性相对畴壁位移的阻力作用, 使得FeCoB-SiO₂非晶膜的矫顽力远大于一般磁性金属非晶薄膜, 其矫顽力达13130.205 A/m. 使用同轴传输法的微波参数测量结果表明在3.8和5 GHz处出现了双共振峰, 使得在500MHz~12GHz范围内μ'>2.5, μ''在3.6~8 GHz, 其值超过6, 在较宽的频带范围内有着良好的微波电磁特性.

关键词: 微波电磁特性, 聚酯基片, 磁导率

Abstract: Microstructural and electromagnetic properties of FeCoB-SiO₂ films prepared on PET substrates by radio- frequency sputtering were investigated. The as-deposited FeCoB-SiO₂ films are found to be amorphous with an electrical resistivity of 1755.73 μΩ·cm and a saturation magnetization of 0.7 T. Because of the existence of nonmagnetic matrix resistance to magnetic wall displacement, those FeCoB-SiO₂ films have a substantially higher coercivity of 13130.205 A/m over that of traditional amorphous magnetic films. Complex permeability μ was measured by a microwave network analyzer using the coaxial transmission technique, and double resonance peaks in microwave magnetic permeability were observed in the frequency range of 3.8-5 GHz. This is beneficial for the films to be used as a micro absorber at large bandwidths, resulting in μ'>2.5 in the frequency range of 500 MHz-12 GHz and μ''>6 for 3.6-8 GHz. The experimental results demonstrate that the FeCoB-SiO2 films deposited on flexible substrates have good potential for high frequency applications.

Key words: microwave electromagnetic property, PET substrate, permeability

中图分类号:

TB33

张丽, 朱致伟, 旷仁熊, 邓龙江. 聚酯基片上制备FeCoB-SiO₂薄膜的微观结构与微波电磁特性[J]. 无机材料学报, 2010, 25(11): 1150-1154.

ZHANG Li, ZHU Zi-Wei, KUANG Ren-Xiong, DENG Long-Jiang. Microstructural and Microwave Electromagnetic Properties of FeCoB-SiO₂ Film on PET Substrate[J]. Journal of Inorganic Materials, 2010, 25(11): 1150-1154.

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聚酯基片上制备FeCoB-SiO₂薄膜的微观结构与微波电磁特性

Microstructural and Microwave Electromagnetic Properties of FeCoB-SiO₂ Film on PET Substrate

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