大尺寸CVD金刚石厚膜的制备及应用

无机材料学报

大尺寸CVD金刚石厚膜的制备及应用

王兵¹; 冉均国¹; 梅军²; 李力²; 季锡林²

1. 四川大学无机材料系, 成都 610065; 2. 西南结构力学研究所; 四川绵阳 621900

收稿日期:2001-04-23 修回日期:2001-07-25 出版日期:2002-03-20 网络出版日期:2002-03-20

Preparation and Application of Large Size CVD Diamond Thick Films

WANG Bing¹; RAN Jun-Guo¹; MEI Jun²; LI Li²; JI Xi-Lin²

1.; Department of Inorganic Materials; Sichuan University; Chengdu 610063; China; 2. Southwest Institute of Structure Mechanics; Mianyang; Sichuan 621900; China

Received:2001-04-23 Revised:2001-07-25 Published:2002-03-20 Online:2002-03-20

摘要/Abstract

摘要： 采用电子辅助化学气相沉积法（ＥＡＣＶＤ）制备了直径１２０ｍｍ、厚度１ｍｍ以上的大尺寸金刚石厚膜，这是国内已见报道的最大成膜尺寸．ＳＥＭ和Ｒａｍａｎ光谱分析表明它是一种纯晶质的多晶金刚石材料；其硬度接近天然金刚石，远高于聚晶金刚石．将这种材料加工成拉丝模具，现场拉丝结果表明其拉丝效果与天然金刚石和进口优质聚晶相当，优于国产聚晶．用这种金刚石制成的拉丝模具可广泛用于拉制钨、钼、铜和不锈钢丝．

关键词: CVD金刚石厚膜, 电子辅助, 拉丝模具

Abstract: Diamond thick films with 120mm in diameter, up to 1mm thickness were prepared by the electron-assistant chemical vapor deposition (EACVD) method. SEM, Raman
spectroscopy characterization and hardness test show that the films are pure polycrystalline diamond materials with hardness approaching to that of natural
diamond (ND) and much higher than that of polycrystalline diamond (PCD). Field tests demonstrate that the drawing effect of CVD diamond wire dies is nearly equal
to those obtained from ND and high quality PCD wire dies. This kind of CVD diamond wire die can be widely used in drawing W, Mo, Cu and stainless steel filaments.

Key words: CVD diamond thick film, electron assistant, wire die

中图分类号:

O484

王兵,冉均国,梅军,李力,季锡林. 大尺寸CVD金刚石厚膜的制备及应用[J]. 无机材料学报.

WANG Bing,RAN Jun-Guo,MEI Jun,LI Li,JI Xi-Lin. Preparation and Application of Large Size CVD Diamond Thick Films[J]. Journal of Inorganic Materials.