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氢等离子体改性TiO2薄膜血液相容性研究

徐益1,2, 黄楠1, 孙鸿1   

  1. 1. 西南交通大学材料先进技术教育部重点实验室, 成都 610031; 2. 重庆工业职业技术学院, 重庆 400050
  • 收稿日期:2008-02-20 修回日期:2008-04-18 出版日期:2008-11-20 网络出版日期:2008-11-20

Blood Compatibility of Titanium Oxide Films Modified by Hydrogen Plasma Reduction

XU Yi1,2, HUANG Nan1, SUN Hong1   

  1. 1. Key Lab of Advanced Materials Technology, Ministry of Education, Southwest Jiaotong University, Chengdu 610031, China; 2. Chongqing Industry Polytechnic College, Chongqing 400050, China
  • Received:2008-02-20 Revised:2008-04-18 Published:2008-11-20 Online:2008-11-20

摘要: 采用非平衡磁控溅射法制备金红石相TiO2薄膜, 并用氢等离子体对TiO2薄膜进行了表面改性. XRD结果表明, 改性薄膜的结构并没有发生变化, FTIR检测薄膜中没有发现明显的-OH基团. XPS分析表明, 氢还原后薄膜次表面出现了氧缺位. 浸润性实验结果表明, 氢还原TiO2薄膜的亲水性有轻微的减弱. 血小板黏附实验发现, 在还原温度较低、时间较短(110℃、15min)时, TiO2薄膜的血液相容性得到明显改善, 这与氧缺位的量有关, 适量的氧缺位能改善TiO2薄膜的血液相容性.

关键词: 钛氧薄膜, 氧缺位, 氢等离子还原, 血液相容性, 非平衡脉冲磁控溅射

Abstract: Rutile titanium oxide films on silicon substrate were prepared by unbalanced reactive pulsed magnetron sputtering and subsequently modified by hydrogen plasma reduction. The XRD patterns show that the modified titanium oxide films consist of single rutile phase, which is similar to as-deposited films. FTIR results exhibit that no obvious -OH groups exist in the films. XPS spectra display that oxygen deficiency exist in the film after hydrogen plasma reduction. The wettability experiment show that the hydrophilicity of the hydrogen plasma modified Ti-O films decreases slightly. The anticoagulation property of Ti-O films modified at lower temperature in short time (110℃, 15min) is obviously improved, which is related to the content of oxygen deficiency. Consequently hydrogen introducing is an effective way to improve the anticoagulation property of titanium oxide films.

Key words: titanium oxide film, hydrogen reduction, anticoagulation property, UBMS, XPS

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