PZT基压电矩形薄型单片在电场下的异常大弯曲行为研究

doi:10.15541/jim20260149

无机材料学报

• 研究论文 •

PZT基压电矩形薄型单片在电场下的异常大弯曲行为研究

张桃^1,2, 满振勇², 阮学政², 郑嘹赢², 曾华荣², 李国荣^1,2

1.上海大学微电子学院, 上海 201800;
2.中国科学院上海硅酸盐研究所, 关键陶瓷材料全国重点实验室, 上海 201899

收稿日期:2026-04-07 修回日期:2026-05-26
作者简介:张桃(1987-), 男, 硕士研究生. E-mail: zhangtao@shu.edu.cn
基金资助:
国家自然科学基金重点项目(U2241242)

Study on the Anomalous Large Bending Behavior of PZT-Based Piezoelectric Monolithic Rectangular Thin Sheets Under Electric Fields

ZHANG Tao^1,2, MAN Zhenyong², RUAN Xuezheng², ZHENG Liaoying², ZENG Huarong², LI Guorong^1,2

1. School of Microelectronics, Shanghai University, Shanghai 201800, China;
2. State Key Laboratory of High Performance Ceramics, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201899, China

Received:2026-04-07 Revised:2026-05-26
About author:ZHANG Tao (1987-), male, Master candidate. E-mail: zhangtao@shu.edu.cn
Supported by:
National Natural Science Foundation of China (U2241242)

摘要/Abstract

摘要： 压电陶瓷薄片作为双晶片压电臂梁致动器的核心构件,在弯曲器件中具有广泛应用。目前,厚度为50~100 μm的PZT基单片陶瓷的微观结构与机电性能的关联规律仍未系统阐明,制约了薄片型PZT压电悬臂梁致动器的精准调控与性能优化。本研究对厚度为68 μm、长39 mm × 宽13 mm的PZT基压电矩形薄片在极化后不同电场作用下产生的异常大弯曲行为进行研究,发现该薄片的单片悬臂梁结构在一阶谐振频率38.44 Hz、12kV/cm交流电场驱动作用下,陶瓷薄片悬臂梁有效长度30.8 mm处的顶端产生了幅值达5.5 mm的电致弯曲位移,而经典压电理论中,均匀极化的单一压电层薄片,其外电场下的本征响应仅为面内均匀伸缩,不产生弯曲现象。对此,研究结合原位X射线衍射（XRD）、拉曼光谱（Raman）与压电力显微镜（PFM）表征发现,烧结与极化过程诱导的表面结构不对称性形成的本征晶格应变差,为弯曲提供初始驱动力;极化后外电场通过诱导可逆三方-四方相变放大应变差,又显著增强了弯曲效应。本研究为PZT基压电悬臂梁致动器的设计优化提供了理论与实验支撑。

关键词: PZT基压电陶瓷, 电致弯曲, 晶格应变差, 逆压电效应, 悬臂梁致动器

Abstract: Piezoelectric ceramic thin sheets, as the core components of bimorph piezoelectric cantilever actuators, are widely used in bending devices. Currently, the correlation between the microstructure and electromechanical properties of 50~100 μm thick monolithic PZT-based ceramics remains unclear, restricting the precise control and performance optimization of thin-film PZT piezoelectric cantilever actuators. In this work, the anomalous large bending behavior of a 68 μm-thick PZT-based piezoelectric rectangular sheet (dimensions: 39 mm × 13 mm) under different electric fields after polarization was investigated. Under a cantilever configuration, a large tip displacement amplitude of 5.5 mm at the free end (effective cantilever length of 30.8 mm) was observed at the first-order resonant frequency of 38.44 Hz and an alternating electric field of 12 kV/cm. In contrast, classical piezoelectric theory predicts only in-plane uniform expansion/contraction for uniformly polarized monolithic piezoelectric thin films, with no bending effect. To address this discrepancy, in-situ X-ray diffraction (XRD), Raman spectroscopy, and piezoresponse force microscopy (PFM) were employed. The results reveal that the intrinsic lattice strain mismatch induced by surface structural asymmetry during sintering and poling provides the initial driving force for bending; the applied electric field further amplifies this strain mismatch via a reversible rhombohedral-tetragonal phase transition after poling, significantly enhancing the bending effect. This study provides theoretical and experimental support for the design and optimization of PZT-based piezoelectric cantilever actuators.

Key words: PZT-based piezoelectric ceramics, electro-induced bending, lattice strain mismatch, inverse piezoelectric effect, cantilever beam actuator

中图分类号:

TM282

张桃, 满振勇, 阮学政, 郑嘹赢, 曾华荣, 李国荣. PZT基压电矩形薄型单片在电场下的异常大弯曲行为研究[J]. 无机材料学报, DOI: 10.15541/jim20260149.

ZHANG Tao, MAN Zhenyong, RUAN Xuezheng, ZHENG Liaoying, ZENG Huarong, LI Guorong. Study on the Anomalous Large Bending Behavior of PZT-Based Piezoelectric Monolithic Rectangular Thin Sheets Under Electric Fields[J]. Journal of Inorganic Materials, DOI: 10.15541/jim20260149.

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PZT基压电矩形薄型单片在电场下的异常大弯曲行为研究

Study on the Anomalous Large Bending Behavior of PZT-Based Piezoelectric Monolithic Rectangular Thin Sheets Under Electric Fields

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