飞秒激光沉积β-FeSi2/Si半导体膜及光学性能研究
周幼华,陆培祥,杨光,杨义发,郑启光
β-FeSi2 thin film prepared by femtosecond laser ablation and its optical characteristic
ZHOU You-Hua,LU Pei-Xian,YANG Guang,YANG Yi-Fa,ZHENG Qi-Guang
无机材料学报
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2007, (3): 545
-549
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DOI: 10.3724/SP.J.1077.2007.00545
