甲烷浓度对CVD金刚石薄膜晶体学生长过程的影响
朱宏喜,毛卫民,冯惠平,吕反修,Vlasov I I,Ralchenko V G,Khomich A V
Influence of Methane Concentration on Crystal Growing Process in CVD Free Standing Diamond Films
ZHU Hong-Xi,MAO Wei-Min,FENG Hui-Ping,LU Fan-Xiu,Vlasov I I,Ralchenko V G,Khomich A V
无机材料学报
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2007, (3): 570
-576
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DOI: 10.3724/SP.J.1077.2007.00570
