连续离子层吸附与反应法(SILAR)生长ZnO多晶薄膜的研究

高相东,李效民,于伟东

Deposition of Polycrystalline ZnO Thin Films by Successive Ionic Layer Adsorption and Reaction Process (SILAR)

GAO Xiang-Dong,LI Xiao-Min,YU Wei-Dong

无机材料学报 . 2004, (3): 610 -616 .