C-H-O和C-H-N体系生长金刚石膜的气相化学模拟

戚学贵,陈则韶,王冠中,廖源

Simulation of Gas Phase Chemistry in C-H-O and C-H-N Systems for Chemical Vapor Deposition Diamond Films

QI Xue-Gui,CHEN Ze-Shao,WANG Guan-Zhong,LIAO Yuan

无机材料学报 . 2004, (2): 404 -410 .