φ300mm的大直径直拉单晶硅勾形磁场下生长的数值模拟
宇慧平,隋允康,张峰翊,常新安,安国平
Numerical Simulation of a Czochralski Silicon Crystal Growth with a Large Diameter 300mm Under a Cusp Magnetic Field
YU Hui-Ping,SUI Yun-Kang,ZHANG Feng-Yi,CHANG Xin-An,AN Guo-Ping
无机材料学报
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2005, (2): 453
-458
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